Ask Winston



Headway Research, Inc.
Headway Research, Inc.

The Headway Story...

Headway Research, Inc. has been doing business worldwide since 1964. Headway has contributed many "firsts" in the technology of producing micro-electronic devices. A few firsts:

1964

  • First high acceleration spin coater.
  • First Spin coater with electronic speed rotation.
  • First vacuum-to-chuck interlock, first quick braking.

1966

  • First successful pump for photoresist.
  • First commercial spin developer for photoresist.
  • First mechanical scrubber for substrate surfaces.

1973

  • First Automated surface scrubber using polishing cloth technique.

1975

  • Developed first large substrate spinner for 14" diameter glass master discs for laser disc research.

1977

  • Initiated successful edge rounding of semiconductor substrates in the United States. Increased IC yields by 25%.

1985

  • Introduced "Inhibited Drying Spin Coating" techniques for improved coatings, especially on rectangular or odd-shaped substrates.

1990

  • Improved scrubbing techniques for large and rectangular substrates, using small disposable polishing cloth discs.

1998

  • New PWM32 Spin controller for low cost R & D use.
  • New HDP98 High purity fluid dispenser.
  • New Substrate lifter/alignment system.

My address has been cloaked to hide it from spambots. Please use a javascript enabled browser to see it.


Headway Research, Inc.
3713 Forest Lane
Garland, Texas 75042 U.S.A.

Phone (972) 272-5431
Fax (972) 272-7817