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Headway Research, Inc.
Headway Research, Inc.

HRI Instruction Manuals

The model PWM32 Spin Controller has been upgraded and new product is now called model PWM50. We buy used equipment and factory re-furbish it at times, so the PWM32 may linger in our terminology and sales material for a considerable time. References to the PWM32 will be updated as soon as practical.

See the special page explaining the main differences in the two models.

Headway provides two instruction manuals with each complete assembly shipped from our plant in Texas. If you happen to misplace your set or if you want a copy for your office, please refer to the following list when ordering a new manual. If you do not see your spinner listed, please give us a call.


HRI Part # Description

PWM32 Spinner Series - Includes Models PWM32-PS-R790,
PWM32-PS-CB15, and PWM32-BD-CB15
Please be sure to let us know if your spinner has accessories;
i.e. moving arm, substrate lifter, etc.
8-24024 PWM32-BD-LS22 Spinner Series
8-22498 PWM202-BD-CB15 Spinner Series
8-24006 PWM202-BD-LS22 Spinner Series
8-22363 MP100 Spinners - Includes Models MP100-BD-CB15,
MP100-BD-LS22, & MP100-BD-IT22
8-11371 PS80 Small Substrate Spin Cleaner
8-19624 MC22 Large Substrate Scrubber
8-05013 MV4000 Vapor Cleaner
8-23072 HDP98 Dispenser - Includes both Gravity (G) and Vacuum (V) versions


We have been selling spinners and their associated accessories for over 35 years. During this time we have designed a great number of spinner versions. We know that at least one AHT Spinner, the first spinner we manufactured in the early 1960s, is still in operation today. We also know that several of our vintage EC/PM Spinners are still "spinning away" in research facilities all over the world. Because of this we continue to make available, not only replacement parts for these spinners but their instruction manuals as well. Here is a list of instruction manuals for our non-current products.

8-05249 EC/PM Spinner Series - Serial numbers below 30,000
8-11941 EC/PM Spinner Series - Serial Numbers 30,000 to 39,999
8-13242 EC/PM Spinner Series - Serial Numbers 40,000 and above
9-19456 EC101DT/PM101DT Spinner Series

8-07635 EC102 Type 1 Dispenser
8-07636 EC102 Type 2 Dispenser
8-07637 EC102 Type 3 Dispenser
8-07638 EC102 Type 4 Dispenser
8-07639 EC102 Type 5 Dispenser
8-07640 EC102 Type 6 Dispenser

8-06898 AC201 Spinner Series - All Versions
Please specify number of spinner heads

8-19333 LM22 Spinner Series
8-19139 LS22 Spinner Series
8-14623 LS510MPEC Spinner Series
8-16441 LS510PCR Spinner Series

8-07570 SC80 Small Substrate Spin Cleaner

8-09494 PD-WEP Wafer Edge Profiler - All Versions
Please specify number of heads

8-04957 AHT Spinner Series - THE ONE THAT STARTED IT ALL!

There are, of course, many, many more manuals that can be duplicated so if you do not find your spinner listed just give us a call.

Headway Research, Inc.
3637 Marquis Dr, Ste #102
Garland, Texas 75042 U.S.A.

Phone (972) 272-5431
Fax (972) 272-7817