BD2 and BD5 Motor

PS Motor

Headway offers three motor configurations for our Spin Coaters and Spin Developers. The three motors available offer flexibility for the needs of different substrates.

PS MOTOR ASSEMBLY - The Model PS Motor Assembly is designed for relatively light weight loads such as silicon wafers, small photo masks and other similar substrates. This motor is rated to spin up to 10,000 rpm and can be used with our PWM32 and PWM202 controllers.

BD MOTOR ASSEMBLY - The Model BD motor Assembly is designed for heavy loads such as compact disc masters, thick E-beam masks, LCD panels and similar substrates. The BD motors can be used with two controller configurations. The model PWM32 controller can drive this motor to 2500 RPM or 5000 RPM with the PWM32FP. The controller model PWM202 can drive the BD2 motor to 2500 rpm and the BD5 motor to 5000 RPM. The BD2 motor can be used for even heavier loads and provides twice the inertial load of the BD5 motor up to 2500 rpm. The BD2 motor has been used to spin an inertial load as large as a 3/8" thick, 14" diameter aluminum plate.