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Headway Research, Inc.
Headway Research, Inc.

Spin Coater/Developer Motors



The model PWM32 Spin Controller has been upgraded and new product is now called model PWM50. We buy used equipment and factory re-furbish it at times, so the PWM32 may linger in our terminology and sales material for a considerable time. References to the PWM32 will be updated as soon as practical.

See the special page explaining the main differences in the two models.

Motor Options

BD2 and BD5 Motor

PS Motor



Headway offers three motor configurations for our Spin Coaters and Spin Developers. The three motors available offer flexibility for the needs of different substrates.

PS MOTOR ASSEMBLY - The Model PS Motor Assembly is designed for relatively light weight loads such as silicon wafers, small photo masks and other similar substrates. This motor is rated to spin up to 10,000 rpm and can be used with our PWM32 and PWM202 controllers.

BD MOTOR ASSEMBLY - The Model BD motor Assembly is designed for heavy loads such as compact disc masters, thick E-beam masks, LCD panels and similar substrates. The BD motors can be used with two controller configurations. The model PWM32 controller can drive this motor to 2500 RPM or 5000 RPM with the PWM32FP. The controller model PWM202 can drive the BD2 motor to 2500 rpm and the BD5 motor to 5000 RPM. The BD2 motor can be used for even heavier loads and provides twice the inertial load of the BD5 motor up to 2500 rpm. The BD2 motor has been used to spin an inertial load as large as a 3/8" thick, 14" diameter aluminum plate.


FEATURES COMMON TO ALL MOTORS:
  • DC Servo Motor
  • Vacuum through the shaft design -- for vacuum chucks and substrate lifter option




sales@headres.com

Headway Research, Inc.
3713 Forest Lane
Garland, Texas 75042 U.S.A.

Phone (972) 272-5431
Fax (972) 272-7817