EC Non-Vacuum Chucks - Carrier/Recess Design
These non-vacuum, recess type chucks are used with the PWM32 Spinner Series as well as the EC101/PM101 Spinner Series. The recess chuck is made of anodized aluminum and is machined to specifications obtained from the user.
The substrate is held in a pocket that closely conforms to the substrate's dimensions. The top surface of the substrate is essentially level with the top surface of the chuck, thus giving the appearance (from a coating point of view) of a circular substrate. No vacuum is used to hold the substrate, however, slots that extend from the backside of the chuck to the cavity beneath the substrate induce a negative cavity pressure while spinning, which holds the substrate in place. These slots also provide drainage for any fluids that enter the cavity around the edges of the substrates. An o-ring vacuum sub-chuck secures the recess carrier to the rotating spindle. Since the sub-chuck can accommodate various sizes of recess carrier chucks, the user can easily switch between different sizes of substrates.
Material - Hard Anodized Aluminum |
|||
|---|---|---|---|
HRI Part Number |
Substrate Size |
Base Part Number |
Base Chuck Sizes |
2-20028 |
1" x 2" x .025" |
9-02684 |
2-1/4" O-Ring |
3-18762 |
1" x 3" x .038" |
1-14419 |
2-1/4" O-Ring |
2-20163 |
2" x 2" x .025" |
1-14419 |
2-1/4" O-Ring |
2-20644 |
3" x 3" x .015" |
1-14419 |
2-1/4" O-Ring |
2-19839 |
3.94" x 3.94" |
1-19837 |
3" O-Ring |
2-21052 |
4" x 4" x .025" |
1-14419 |
2-1/4" O-Ring |
Raised Center Carrier Chucks |
|||
HRI Part Number |
Raised Center Size |
Base Part Number |
Base Chuck Size |
2-20559 |
.5" |
2-02687 |
1-3/4" O-Ring |
2-20558 |
.25" |
1-14419 |
2-1/4" O-Ring |
1-21151 |
1" |
2-02687 |
1-3/4" O-Ring |
2-20560 |
1.25" |
1-14419 |
2-1/4" O-Ring |
Select Below for Information on All Chucks