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Headway Research, Inc.
Headway Research, Inc.

Chucks

In order to assure the safety and proper processing of your substrates, please take a moment to read this page. Use the internal links to jump to information below after you have read this page.

Headway offers a wide range of chucks for holding and spinning a variety of substrates. Available chuck designs are Flat Surface, O-Ring, Mechanical Locating, Recess/Carrier, Recess/Non-Vacuum, Magnetic, Raised Center and a wide variety of custom chucks. Vacuum, mechanical-locating, clamping or magnetic forces are used to hold substrates on the chucks. Stainless steel, hard anodized aluminum, and various types of plastic chucks are available to suit different process requirements.

When using flat-surface, or o-ring type chucks, the substrate should overhang the chuck by 1/4" or more, to prevent fluid reaching the surface of the chuck. If fluid reaches the substrate/chuck interface, capillary forces will wick the fluid between the substrate and chuck, thereby fouling the backside of the substrate and the surface of the chuck. The flat-surface and o-ring chucks are usually provided with a plastic disc mounted below the surface of the chuck, with a larger diameter than the substrate. This disc provides a visual alignment aid to help center the substrate on the chuck. The disc also helps protect the overhang of the substrate from aerosol particle contamination during the spinning operation. Some flat surface and o-ring chucks are designed as "raised center" chucks, meaning the alignment disc is a machined part of the chuck.

For most applications with vacuum chucks, the recommended vacuum is 23 "/Hg or more. HRI spinner interlocks are typically set at the factory to operate at about 17 "/Hg, and drop out approximately 1-1/2 "/Hg below the operate point. 23"/Hg or more provides for quickly passing through the operate point, and therefore provides a quick consistent response. The interlock set-point is adjustable, and can be adjusted to a much lower level if necessary, for thin fragile substrates. An accessory vacuum regulator may be required to operate at a consistent vacuum, lower than the source.

Chucks are precision made parts. Care should be taken when handling them. Dropping or hitting the chuck can cause dents or raised edges (hardly visible) which may create a vacuum leak or other damage. Such damage will prevent the spinner from operating. Chucks are designed for easy installation and removal. They should be removed and cleaned immediately after use, taking care to maintain the integrity of the internal o-ring seal, and external o-rings if applicable. Since certain solvents can cause premature degradation or swelling of the o-rings, it is recommended that several spare o-rings be purchased with the original chuck. Care should be taken to avoid getting fluid into the vacuum system through the vacuum hole(s) in the chuck during use or cleaning. Damage to the vacuum circuit or vacuum seal to the motor shaft can result.

We have designed more than 600 chucks to meet our customer needs. Chances are we have already designed one in the size and material you need. We have displayed a number of the more common chucks. If you do not find a chuck that meets your needs in the following information, we can help locate or design a solution for your application.

Select Below for Information on All Chucks


Headway Research Products
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sales@headres.com

Headway Research, Inc.
3713 Forest Lane
Garland, Texas 75042 U.S.A.

Phone (972) 272-5431
Fax (972) 272-7817