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Headway Research, Inc.
Headway Research, Inc.

PS80 Type Chucks

The PS80 Type chucks are designed to uniquely fit the PS80 Spin Cleaner.

  • The chuck-to-shaft interface is a 3/8" ID D-shaped acetal insert, similar to the EC chucks.
  • All features and limitations of the EC chucks apply to the PS80 chucks, but the chucks are NOT interchangeable.
  • The PS80 chucks can be used ONLY on the PS80 Spin Cleaner.


PS80 Chuck
PS80 Flat Surface Larger Than Vacuum Chucks

Stainless steel and hard anodized aluminum chucks for spinning thin substrates such as silicon and germanium. The vacuum chuck should be larger than the wafer to be cleaned. Use of this type chuck eliminates possible breakage caused by operator applying excessive pressure on an overhanging wafer.

Note: Certain detergents or solvents may be pulled under the wafer resulting in staining on the back side. When this occurs, vacuum chucks smaller than the wafer may be necessary. (See flat surface vacuum chucks below).



PS80 Flat Surface Larger Than Vacuum Chucks
Wafer Size Chuck Size Material Part No.
1" 1 5/8" O.D.SS Stainless Steel 1-04739
2" 2 1/4" O.D. SS Stainless Steel 1-04740
3" 3 1/4" O.D. SS Stainless Steel 1-04741
3 1/4" 4" O.D. SS Stainless Steel 1-08241
4" 4 1/4" O.D. SS Stainless Steel 1-10745
5" 5 1/4" O.D. AL Hard Anodized Aluminum 1-09289



PS80 Flat Surface Vacuum Chucks

Stainless steel and hard anodized aluminum chucks used for spinning thin substrates such as silicon and germanium. Cross and scroll for better gripping extends to the edge of the chuck. This chuck should be selected if unacceptable staining occurs with the use of the Flat Surface Larger Than Chucks above. The Flat Surface Vacuum Chucks should always be smaller than the wafer.

PS80 Flat Surface Vacuum ChuckPS80 Flat Surface Vacuum Chucks
Wafer Size Chuck Size Material Part No.
1" 15/16" O.D.SS Stainless Steel 1-04736
2" 1 7/16" O.D. SS Stainless Steel 1-04737
3" 2 1/4" O.D. SS Stainless Steel 1-04738
4" 3 1/4" O.D. SS Stainless Steel 1-10746
5" 4 1/4" O.D. AL Hard Anodized Aluminum 1-10764




PS80 Recess, O-Ring Vacuum Chucks

Hard anodized aluminum chucks for spinning square substrates or masks. This type of chuck has a machined recess the size of the substrate, a cross and scroll design, and an O-ring for better holding power within the recess.

PS80 Recess, O-Ring Vacuum Chucks - Hard Anodized Aluminum
Substrate Size/Recess Size Part No.
2 x 2" x .060" 1-04933
2 1/2" x 2 1/2" x .060" 1-04934
2 1/2" x 2 1/2" x .090" 1-04935
3" x 3" x .060" 1-08088
4" x 4" x .060" 1-07567
4" x 4" x .090" 1-07399


Select Below for Information on All Chucks

Headway Research Products
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sales@headres.com

Headway Research, Inc.
3713 Forest Lane
Garland, Texas 75042 U.S.A.

Phone (972) 272-5431
Fax (972) 272-7817