PS80 Type Chucks
The PS80 Type chucks are designed to uniquely fit the PS80 Spin Cleaner.
PS80 Flat Surface Larger Than Vacuum Chucks
Stainless steel and hard anodized aluminum chucks for spinning thin substrates such as silicon and germanium. The vacuum chuck should be larger than the wafer to be cleaned. Use of this type chuck eliminates possible breakage caused by operator applying excessive pressure on an overhanging wafer.
Note: Certain detergents or solvents may be pulled under the wafer resulting in staining on the back side. When this occurs, vacuum chucks smaller than the wafer may be necessary. (See flat surface vacuum chucks below).
PS80 Flat Surface Vacuum Chucks
Stainless steel and hard anodized aluminum chucks used for spinning thin substrates such as silicon and germanium. Cross and scroll for better gripping extends to the edge of the chuck. This chuck should be selected if unacceptable staining occurs with the use of the Flat Surface Larger Than Chucks above. The Flat Surface Vacuum Chucks should always be smaller than the wafer.
PS80 Recess, O-Ring Vacuum Chucks
Hard anodized aluminum chucks for spinning square substrates or masks. This type of chuck has a machined recess the size of the substrate, a cross and scroll design, and an O-ring for better holding power within the recess.
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