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Headway Research, Inc.
Headway Research, Inc.

EC-Type Chucks



The model PWM32 Spin Controller has been upgraded and new product is now called model PWM50. We buy used equipment and factory re-furbish it at times, so the PWM32 may linger in our terminology and sales material for a considerable time. References to the PWM32 will be updated as soon as practical.

See the special page explaining the main differences in the two models.

The EC Type chucks fit a 3/8" diameter shaft with a D-flat. They slip on and off and are not attached rigidly to the shaft. No tools are required to change chucks. These chucks were designed for small silicon wafers and other relatively small and light-weight substrates. The smaller chucks will operate to 10,000 rpm. An acetal insert with a D-hole inside the chuck slips over the D-flat of the motor shaft. This interface is for light-duty and not intended for heavy chuck/substrate combinations at high rpm/acceleration. Substrates to perhaps four inches square and 1/8" thick could be spun up to 1,000 rpm, if an appropriate light-weight mechanical locating chuck is used. Consideration must be shown for the tensile strength and condition of the substrates to avoid fragmentation due to excessive centrifugal force. Ten thousand rpm should probably be used only on substrates of three inch diameter or less.

These chucks are designed for use with the current PWM32-PS Spinner system and the previously shipped model EC101/PM101 type spinners. The PWM32-PS Spinner system has a top speed of 10,000 rpm. An adapter is available for the heavy-duty LS type chuck interface, to permit the use of the EC type chucks with that type of system.

EC101 Vacuum Chucks Flat Surface Cross & Scroll
EC101 Vacuum Chucks O-Ring Design
EC101 Vacuum Chucks Mechanical Locating Flat Surface
EC101 Vacuum Chucks Mechanical Locating O-Ring
EC101 Non-Vacuum Recessed Chucks
EC101 Non-Vacuum Carrier Recessed Chucks
EC101 Vacuum Chucks Raised Center Cross & Scroll

Select Below for Information on All Chucks

Headway Research Products
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sales@headres.com

Headway Research, Inc.
3713 Forest Lane
Garland, Texas 75042 U.S.A.

Phone (972) 272-5431
Fax (972) 272-7817