The EC Type chucks fit a 3/8" diameter shaft with a D-flat. They slip on and off and are not attached rigidly to the shaft. No tools are required to change chucks. These chucks were designed for small silicon wafers and other relatively small and light-weight substrates. The smaller chucks will operate to 10,000 rpm. An acetal insert with a D-hole inside the chuck slips over the D-flat of the motor shaft. This interface is for light-duty and not intended for heavy chuck/substrate combinations at high rpm/acceleration. Substrates to perhaps four inches square and 1/8" thick could be spun up to 1,000 rpm, if an appropriate light-weight mechanical locating chuck is used. Consideration must be shown for the tensile strength and condition of the substrates to avoid fragmentation due to excessive centrifugal force. Ten thousand rpm should probably be used only on substrates of three inch diameter or less.
These chucks are designed for use with the current PWM32-PS Spinner system and the previously shipped model EC101/PM101 type spinners. The PWM32-PS Spinner system has a top speed of 10,000 rpm. An adapter is available for the heavy-duty LS type chuck interface, to permit the use of the EC type chucks with that type of system.
EC101 Vacuum Chucks Flat Surface Cross & Scroll
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