EC Non-Vacuum Chucks
Recess Design
These non-vacuum, recess type chucks are used with the PWM32 Spinner Series as well as the EC101/PM101 Spinner Series. The recess chuck is made of anodized aluminum and is machined to specifications obtained from the user.
The substrate is held in a pocket that closely conforms to the substrate's dimensions. The top surface of the substrate is essentially level with the top surface of the chuck, thus giving the appearance (from a coating point of view) of a circular substrate. No vacuum is used to hold the substrate, however, slots that extend from the backside of the chuck to the cavity beneath the substrate induce a negative cavity pressure while spinning, which holds the substrate in place. These slots also provide drainage for any fluids that enter the cavity around the edges of the substrates.
The chart below is a sampling of the hard anodized aluminum chuck sizes we have designed. Recess chucks are machined using dimensions and tolerance specifications obtained from the user.
Materials |
|
|---|---|
Substrate Sizes |
Hard Anodized Aluminum |
|
1" x 1" x .025" |
|
1" x 1" x .012" |
|
1" x 1" x .057" |
|
1" x .5" x .020" |
|
1" x 1.5" x .06" |
|
2" x 2" x .010" |
|
2" x 2" x .015" |
|
2" x 2" x .025" |
|
2" x 2" x .043" |
|
3" x 3" x .024" |
|
3" x 3" x .043" |
|
4" x 4" x .06" |
|
4" x 4" x .010" |
|
4" x 4" x .023" |
|
4" x 4" x .140" |
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